4pEA6. The removal of small particles using high-frequency ultrasonics.

Session: Thursday Afternoon, December 5

Time: 3:15

Author: Ahmed A. Busnaina
Location: Microcontamination Res. Lab., Clarkson Univ., Potsdam, NY 13699-5729


High-frequency (near 1 MHz) liquid-based ultrasonic cleaning (known as megasonic cleaning) is widely used in industry for the removal of particulate contamination. Megasonic cleaning is an effective but poorly understood particle removal technology. It is found that acoustic streaming, microstreaming, and stable cavitation aid in particle removal. Results show that removal efficiencies near ten power is one of the most important parameters in megasonic cleaning. The megasonic input power has a greater effect on the removal efficiency than does temperature. An unexpected decrease in cleaning efficiency at high powers is reported, and attributed to energy attenuation due to increased bubble activity. This is consistent with previous results generated using different megasonic equipment. The results also show that when the optimum reported power is used, the removal efficiency will be high over a wide range of bath temperatures. [Work supported, in part, by the New York State Center for Advanced Materials Processing, Clarkson University.]

ASA 132nd meeting - Hawaii, December 1996