2pEA3. Surface acoustic wave device fabrication.

Session: Tuesday Afternoon, May 14

Time: 3:00

Author: Donald C. Malocha
Location: Elec. and Comput. Eng. Dept., Rm. 407, Univ. of Central Florida, Orlando, FL 32816-2450


Many frequency control operations for wireless and satellite communication systems are provided by acoustic solid-state devices in the operating frequency range from 10 MHz to 3 GHz. Surface acoustic wave (SAW) device technology is a key technology because it is solid state, monolithic, high performance, and low cost. An important parameter is the versatility and simplicity in device fabrication since many techniques developed by the integrated circuit industry can be applied.

from ASA 131st Meeting, Indianapolis, May 1996